Photogrammetric determination of topography of microstructures by scanning electron microscope

Andreas Gleichmann; Johann Michael Koehler; Matthias Hemmleb; Joerg Albertz

doi:10.1117/12.172100

4 April 1994 Photogrammetric determination of topography of microstructures by scanning electron microscope

Andreas Gleichmann, Johann Michael Koehler, Matthias Hemmleb, Joerg Albertz

Proceedings Volume 2184, Three-Dimensional Microscopy: Image Acquisition and Processing; (1994) https://doi.org/10.1117/12.172100
Event: IS&T/SPIE 1994 International Symposium on Electronic Imaging: Science and Technology, 1994, San Jose, CA, United States

Abstract

This paper presents a new, non-destructive technique for high resolution 3D measurements of microstructures based on digital photogrammetry.

Citation Download Citation

Andreas Gleichmann, Johann Michael Koehler, Matthias Hemmleb, and Joerg Albertz "Photogrammetric determination of topography of microstructures by scanning electron microscope", Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); https://doi.org/10.1117/12.172100

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