Micromechanics for actuators

Todd R. Christenson; Henry Guckel; Kenneth J. Skrobis; J. Klein

doi:10.1117/12.179621

13 July 1994 Micromechanics for actuators

Todd R. Christenson, Henry Guckel, Kenneth J. Skrobis, J. Klein

Proceedings Volume 2220, Sensing, Imaging, and Vision for Control and Guidance of Aerospace Vehicles; (1994) https://doi.org/10.1117/12.179621
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

Fabrication processes for microactuator construction must provide the capability to achieve 3- D geometries with a large material base while being able to benefit from the low cost economy of scale of batch processing. These attributes are provided in part by the basic LIGA process originating in Germany which is able to form high aspect ratio metal components up to 500 micrometers in thickness with very low vertical run-out and is compatible with microelectronic processing. The process has been extended to allow geometries with thicknesses up to 1 cm via a low-strain performed photoresist sheet and solvent bonding with x ray exposure via the 2.5 GeV National Synchrotron Light Source (NSLS). Such results enable batch fabrication of parts suitable for larger precision engineered actuators and mechanisms. To demonstrate the extended process capabilities a magnetic micromotor has been constructed using electroplated permalloy and assembled LIGA defined components. The low-inertia of the small rotor sizes is demonstrated by a stepping micromotor with a 150 micrometers diameter rotor which achieved maximum rotational speeds over 150,000 rpm.

Citation Download Citation

Todd R. Christenson, Henry Guckel, Kenneth J. Skrobis, and J. Klein "Micromechanics for actuators", Proc. SPIE 2220, Sensing, Imaging, and Vision for Control and Guidance of Aerospace Vehicles, (13 July 1994); https://doi.org/10.1117/12.179621

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available