Application of photothermal probe beam deflection technique for the high-sensitive characterization of optical thin films with respect to their optical, thermal, and thermoelastic inhomgeneities

Eberhard Welsch; K. Ettrich; M. Peters; Holger Blaschke; W. Ziegler; Axel Bodemann; Michael Reichling

doi:10.1117/12.192178

4 November 1994 Application of photothermal probe beam deflection technique for the high-sensitive characterization of optical thin films with respect to their optical, thermal, and thermoelastic inhomgeneities

Eberhard Welsch, K. Ettrich, M. Peters, Holger Blaschke, W. Ziegler, Axel Bodemann, Michael Reichling

Author Affiliations +

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192178
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Two-dimensional cw photothermal surface displacement (PTD) scans with high spatial resolution provide a new quality for thin-film characterization. This is demonstrated for optical single-layer films of MgF₂ and for 248 nm high-reflecting Al₂O₃/SiO₂ multilayer coatings. Inhomogeneities of the films were detected with a lateral resolution better than 2 micrometers . Photothermal images reveal that Al₂O₃/SiO₂ coatings with low damage thresholds differ above all in the amplitude of the PTD background signal whereas high-damage-threshold-coatings excel in a noticeable decrease in defect concentration. On the other hand, pulsed thermal MIRAGE technique is shown to be capable to yield complementary information with respect to the subdamage behavior as well as the onset of UV damage in Al₂O₃/SiO₂ laser mirrors. Thus, the physical origin of the UV radiation breakdown in optical thin films can be elucidated.

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Eberhard Welsch, K. Ettrich, M. Peters, Holger Blaschke, W. Ziegler, Axel Bodemann, and Michael Reichling "Application of photothermal probe beam deflection technique for the high-sensitive characterization of optical thin films with respect to their optical, thermal, and thermoelastic inhomgeneities", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192178

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