Paper
4 November 1994 Characterization of statistically rough surfaces of thin deposits by an autoregressive process
M. Lafraxo, Monique Rasigni, F. Abdellani, Veronique Buat, Georges Rasigni, Antoine Llebaria
Author Affiliations +
Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192147
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
Abstract
It is shown that rough surfaces of silver, magnesium and iron thin deposits may be accurately described by an autoregressive process. The autoregressive parameters are determined by using either the Yule-Walker or the Burg techniques and the advantages of describing statistically rough surfaces of thin deposits by linear models instead of the traditional autocovariance function, or the spectrum, is discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Lafraxo, Monique Rasigni, F. Abdellani, Veronique Buat, Georges Rasigni, and Antoine Llebaria "Characterization of statistically rough surfaces of thin deposits by an autoregressive process", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192147
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KEYWORDS
Autoregressive models

Iron

Magnesium

Computed tomography

Data modeling

Silver

Thin films

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