Low-loss ion beam sputtered coatings in the nineties

David T. Wei

doi:10.1117/12.192110

4 November 1994 Low-loss ion beam sputtered coatings in the nineties

David T. Wei

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192110
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Dielectric coatings of ultra-low optical loss has been improved by using ion beam sputtering for more than three orders of magnitude within the last two decades. Its fabrication method and kinetic mechanisms are reviewed, and a physical model for the sputtering deposition is described. The manufacture trends and application areas in the 1990s are analyzed and some basic questions are answered.

Citation Download Citation

David T. Wei "Low-loss ion beam sputtered coatings in the nineties", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192110

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