Mass sensitivity calibration of the surface acoustic wave quartz crystal microbalance (SAW QCM) at ambient temperature

A. Peter M. Glassford; Jeffrey W. Garrett; William D. Bowers

doi:10.1117/12.190149

19 October 1994 Mass sensitivity calibration of the surface acoustic wave quartz crystal microbalance (SAW QCM) at ambient temperature

A. Peter M. Glassford, Jeffrey W. Garrett, William D. Bowers

Author Affiliations +

Proceedings Volume 2261, Optical System Contamination: Effects, Measurements, and Control IV; (1994) https://doi.org/10.1117/12.190149
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The mass sensitivity of a 200 MHz surface acoustic wave (SAW) quartz crystal microbalance (QCM) has been determined by comparison with a 10 MHz shear wave (SW) QCM. The calibration technique consisted of exposing the SW QCM and SAW QCM to the same impinging molecular flux, assuming the same rate of deposition on both surfaces, and comparing the change of frequency for the two QCMs. Although the major objective was to determine mass sensitivity at ambient temperature sensitivity was also measured for a range of temperatures between 130 K and 300 K. The materials used to provide the molecular flux were Coray 100 mineral oil, DC 704 silicone oil, and Rheolube R2000 synthetic grease. The mass sensitivity of the SAW QCM measured at 300 K is on the order of 50 Hz.cm²/ng. Mass sensitivity was observed to decrease with temperature, with the lowest value measured being about 39 Hz.cm²/ng at 130 K for Coray 100. The theoretical expression describing the mass sensitivity of the SAW QCM contains two terms, for mass and material elasticity, respectively. The observed decrease in response at lower temperatures (i.e., reduced elasticity) confirm that the material elasticity term, typically ignored at cryogenic temperatures, must be incorporated cryogenic temperatures.

Citation Download Citation

A. Peter M. Glassford, Jeffrey W. Garrett, and William D. Bowers "Mass sensitivity calibration of the surface acoustic wave quartz crystal microbalance (SAW QCM) at ambient temperature", Proc. SPIE 2261, Optical System Contamination: Effects, Measurements, and Control IV, (19 October 1994); https://doi.org/10.1117/12.190149

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available