Preparation and properties of SnO2 films doped with phosphorous and phosphorous plus fluorine

Kroum M. Kolentsov; A. S. Rachkova; Lilyana S. Yourukova; Vesela Pamukchieva

doi:10.1117/12.185802

7 September 1994 Preparation and properties of SnO₂ films doped with phosphorous and phosphorous plus fluorine

Kroum M. Kolentsov, A. S. Rachkova, Lilyana S. Yourukova, Vesela Pamukchieva

Proceedings Volume 2262, Optical Thin Films IV: New Developments; (1994) https://doi.org/10.1117/12.185802
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The suitable layer-building solutions containing tin and phosphorus or tin and phosphorus plus fluorine compounds were prepared. Simple spray pyrolysis technique for obtaining thin SnO₂:P or SnO₂:P, F films on glass or quartz substrates is used. The effect of different parameters such as dopant concentration, substrate temperature and carrier gas flow-rate on film properties is presented. some physical, electrical and optical characteristics of the prepared thin SnO₂:P and SnO₂:P, F films is discussed.

Citation Download Citation

Kroum M. Kolentsov, A. S. Rachkova, Lilyana S. Yourukova, and Vesela Pamukchieva "Preparation and properties of SnO₂ films doped with phosphorous and phosphorous plus fluorine", Proc. SPIE 2262, Optical Thin Films IV: New Developments, (7 September 1994); https://doi.org/10.1117/12.185802

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