Study and realization of Si microcalorimeters for high-resolution spectroscopy

Angelo Alessandrello; Chiara Brofferio; David V. Camin; C. Cattadori; Oliviero Cremonesi; Ettore Fiorini; Andrea Giuliani; A. Maglione; Benno Margesin; Angelo Nucciotti; Maura Pavan; Gianluigi Pessina; Giorgio U. Pignatel; Ezio Previtali; Luigi Zanotti

doi:10.1117/12.186831

16 September 1994 Study and realization of Si microcalorimeters for high-resolution spectroscopy

Angelo Alessandrello, Chiara Brofferio, David V. Camin, C. Cattadori, Oliviero Cremonesi, Ettore Fiorini, Andrea Giuliani, A. Maglione, Benno Margesin, Angelo Nucciotti, Maura Pavan, Gianluigi Pessina, Giorgio U. Pignatel, Ezio Previtali, Luigi Zanotti

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Proceedings Volume 2280, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy V; (1994) https://doi.org/10.1117/12.186831
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

We are developing Si-implanted thermistors to realize high resolution microcalorimeters. We plan to use these devices in an experiment for the determination of the neutrino mass. The measure implies the evaluation of the correct end-point energy of a beta spectrum with a calorimetric approach. Our study is devoted to outline the optimum fabrication process concerning performances and reproducibility. For such reasons we have realized Si thermistors with different concentration of dopant impurities and with different implant geometries. Tests are performed between 4.2 and 1.2 K using a pumped helium cryostat, and selected samples are characterized at very low temperatures in a dilution refrigerator. Good reproducibility of the devices is necessary for producing an array of detectors. At the same time suitable electronics are developed to optimize the detectors preamplifiers link: minimization of the parasitic capacitance is necessary to reduce the integration of signal and to maximize the speed response of the detector.

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Angelo Alessandrello, Chiara Brofferio, David V. Camin, C. Cattadori, Oliviero Cremonesi, Ettore Fiorini, Andrea Giuliani, A. Maglione, Benno Margesin, Angelo Nucciotti, Maura Pavan, Gianluigi Pessina, Giorgio U. Pignatel, Ezio Previtali, and Luigi Zanotti "Study and realization of Si microcalorimeters for high-resolution spectroscopy", Proc. SPIE 2280, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy V, (16 September 1994); https://doi.org/10.1117/12.186831

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KEYWORDS

Sensors

Resistance

Bolometers

Silicon

Doping

Signal detection

Temperature metrology

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