Measuring Micro-Vibrations By Heterodyne Speckle Interferometry

R. Dandliker; J. F. Willemin

doi:10.1117/12.958990

15 May 1981 Measuring Micro-Vibrations By Heterodyne Speckle Interferometry

R. Dandliker, J. F. Willemin

Proceedings Volume 0236, 1980 European Conf on Optical Systems and Applications; (1981) https://doi.org/10.1117/12.958990
Event: 1980 European Conference on Optical Systems and Applications, 1980, Utrecht, Netherlands

Abstract

In-plane as well as out-of-plane displacements and vibrations of objects with diffusely scattering surfaces are measured in real-time. Micro-vibrations with amplitudes down to 1 nm and frequencies up to 10 MHz were analysed at a spatial resolution of 30 μm.

Citation Download Citation

R. Dandliker and J. F. Willemin "Measuring Micro-Vibrations By Heterodyne Speckle Interferometry", Proc. SPIE 0236, 1980 European Conf on Optical Systems and Applications, (15 May 1981); https://doi.org/10.1117/12.958990

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