Optical fibre micromechanical pressure sensor with very low temperature cross sensitivity

Seshadri Ramakrishnan; Heinrich A. Hoefler

doi:10.1117/12.185082

14 September 1994 Optical fibre micromechanical pressure sensor with very low temperature cross-sensitivity

Seshadri Ramakrishnan, Heinrich A. Hoefler

Proceedings Volume 2360, Tenth International Conference on Optical Fibre Sensors; (1994) https://doi.org/10.1117/12.185082
Event: 10th Optical Fibre Sensors Conference, 1994, Glasgow, United Kingdom

Abstract

In the present paper an attempt has been made to immerse the micromechanical resonant structure in the gas medium and investigate the pressure and temperature sensitivities. By means of a closed loop between the exciting laser diode source,the mechanical resonator and the interrogating detector diode it is possible to design a self-oscillating system,which automatically provides the correct mechanical resonance frequency.This simple and economic data reduction system seems to operate quite efficiently.

Citation Download Citation

Seshadri Ramakrishnan and Heinrich A. Hoefler "Optical fibre micromechanical pressure sensor with very low temperature cross-sensitivity", Proc. SPIE 2360, Tenth International Conference on Optical Fibre Sensors, (14 September 1994); https://doi.org/10.1117/12.185082

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