Microlens arrays for segmented laser architectures

Ruediger Grunwald; Uwe Griebner; Rudi Ehlert

doi:10.1117/12.209035

12 May 1995 Microlens arrays for segmented laser architectures

Ruediger Grunwald, Uwe Griebner, Rudi Ehlert

Proceedings Volume 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping; (1995) https://doi.org/10.1117/12.209035
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

Refractive and refractive-reflective arrays of circular as well as cylindrical thin-film microlenses in linear, hexagonal and rectangular arrangements on solid glass/quartz plates and flexible polymer foils have been produced with an improved vapor-deposition technique using shading hole masks and a planetary rotation system. Up to 1000 solitary elements with pitches of 170...350 micrometers and diameters of 50...350 micrometers have been deposited on solid quartz plates and flexible polymer substrates. Focal lengths of typically 1.5...20 mm have been realized. Additional global envelope functions of phase and/or reflectance have been realized. Different types of segmented lasers including imaging and self-imaging arrays as coupling, outcoupling and focussing components have been tested. Graded reflectance micro-mirror arrays (GRMMA) have been used as refractive-reflective elements for solid-state lasers with unstable Talbot resonators which deliver arrays of phase-coupled, focused partial beams. Arrays of diode laser beamlets have been generated by optical transformers combining rod lenses (fibers) with microlens arrays. New schemes for side-on and end-on pumped solid-state lasers and fiber array lasers containing microlens arrays have been developed.

Citation Download Citation

Ruediger Grunwald, Uwe Griebner, and Rudi Ehlert "Microlens arrays for segmented laser architectures", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209035

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