Single-crystal silicon beams formed by merged epitaxial lateral overgrowth (MELO) for optical reflectors

Gerold W. Neudeck; Abul Ehsanul Kabir

doi:10.1117/12.209016

12 May 1995 Single-crystal silicon beams formed by merged epitaxial lateral overgrowth (MELO) for optical reflectors

Gerold W. Neudeck, Abul Ehsanul Kabir

Proceedings Volume 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping; (1995) https://doi.org/10.1117/12.209016
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

Single crystalline silicon has very well known and predictable mechanical, optical, and electrical properties and is easily manufactured with consistent results. It is also integrated circuit compatible and leads to incorporation of circuits and high quality piezoresistors which are available to monitor motion for self-testing. We present for the first time a novel surface micro-machining process using merged epitaxial lateral overgrowth (MELO) silicon to demonstrate the fabrication of single crystal silicon, free standing cantilever beams 1 mm long and 5 micrometers X 10 micrometers in cross section. These beams had no evidence of stress related bending and were free from the substrate, returning to its original position after numerous electrostatic deflections. MELO has also shown great potential for advanced BJT and MOSFET device applications, hence active devices can be incorporated into the deflecting beam arrays. Diodes fabricated in the beams show excellent characteristics with average ideality factors of 1.01. Note that the technology permits adding of single crystal silicon to selected areas, hence it is an additive process as compared to traditional subtractive methods that deposit films over the entire wafer.

Citation Download Citation

Gerold W. Neudeck and Abul Ehsanul Kabir "Single-crystal silicon beams formed by merged epitaxial lateral overgrowth (MELO) for optical reflectors", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available