Testing high-performance galvanometer-based optical scanners

Bruce E. Rohr

doi:10.1117/12.209050

12 May 1995 Testing high-performance galvanometer-based optical scanners

Bruce E. Rohr

Proceedings Volume 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping; (1995) https://doi.org/10.1117/12.209050
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

As the speed and accuracy requirements increase for Galvanometer based optical scanners so does the need for higher performance test equipment. This paper summarizes the practice and challenge of designing such instruments.

Citation Download Citation

Bruce E. Rohr "Testing high-performance galvanometer-based optical scanners", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209050

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