Surface excitation mediated physics in low-fluence laser material interactions and applications to thin-film material processing

Henry Helvajian

doi:10.1117/12.206247

10 April 1995 Surface excitation mediated physics in low-fluence laser material interactions and applications to thin-film material processing

Henry Helvajian

Author Affiliations +

Proceedings Volume 2403, Laser-Induced Thin Film Processing; (1995) https://doi.org/10.1117/12.206247
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

A case is presented for processing of advanced materials via low fluence lasers where the incident fluence is below the ablation threshold. A processing technique is presented which may have application to nanometer scale 'machining'. The technique relies on partially offsetting the reduced incident fluence with enhancement in the efficiency of coupling energy to surface electromagnetic waves (Plasmons). Experimental results are shown that surface corrugation enhances coupling of incident laser radiation to surface plasmons. Additional results are presented in which plasmon excitation results in the nonthermal ejection of ionic species. An experimental result is presented on a composite thin-film material where a specific material plasmon excitation results in a commensurate signature in the species ejection kinetic energy.

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Henry Helvajian "Surface excitation mediated physics in low-fluence laser material interactions and applications to thin-film material processing", Proc. SPIE 2403, Laser-Induced Thin Film Processing, (10 April 1995); https://doi.org/10.1117/12.206247

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