Materials development of smart thin-film TiNi/PZT Heterostructures

Peter G. Mercado; A. Peter Jardine

doi:10.1117/12.200925

2 February 1995 Materials development of smart thin-film TiNi/PZT Heterostructures

Peter G. Mercado, A. Peter Jardine

Proceedings Volume 2427, Active Materials and Smart Structures; (1995) https://doi.org/10.1117/12.200925
Event: Symposium on Active Materials and Smart Structures: Society of Engineering Science 31st Annual Meeting, 1994, College Station, TX, United States

Abstract

Thin film layers of shape memory alloys and ferroelectric ceramics can produce a family of `smart' heterostructures capable of performing both sensing and actuating functions. Important issues in these synthesis of these active structures are the ability to generate the appropriate crystalline phases of each material, while producing defect-free homogeneous high quality films. The compatibility of sol-gel processed Pb(Zr,Ti)O₃ (PZT) thin films with thin film shape memory effect TiNi substrates were investigated. Thin film TiNi was deposited on quartz substrates by physical sputter deposition utilizing a TiNi target in a ultra-high vacuum chamber, and followed by in-situ vacuum annealing. PZT was deposited on TiNi by sol-gel and spin coating processes. The ferroelectric tetragonal phase of PZT was obtained by a 600 degree(s)C anneal for 5 m in air. The heterostructures were nominally defect-free, unlike those obtained through deposition onto bulk TiNi substrates.

Citation Download Citation

Peter G. Mercado and A. Peter Jardine "Materials development of smart thin-film TiNi/PZT Heterostructures", Proc. SPIE 2427, Active Materials and Smart Structures, (2 February 1995); https://doi.org/10.1117/12.200925

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available