Paper
8 May 1995 Comparsion of electrostrictive and piezoceramic actuation for vibration suppression
Michael L. R. Fripp, Nesbitt W. Hagood
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Abstract
Electrostrictors are often avoided in structural control applications due to the non-linearity and temperature sensitivity of the electro-mechanical coupling. This paper describes control techniques so that constant performance is obtained from an electrostrictor in a feedback control system at temperatures ranging from 5 degree(s)C to 57 degree(s)C and at field levels ranging from 90 V/mm to 950 V/mm. The control techniques are experimentally implemented on a cantilevered beam with a 0.9 MN - 0.1 PT electrostrictor. With output linearization and temperature-gain scheduling, the electrostrictive system reduces the RMS strain vibration by 61%. An identical system with a G-1195 piezoceramic controller is used for comparison. The piezoceramic system reduced the strain vibrations by 55% which was robust to temperature variation but not robust to variations in the bias field. Extensive unconstrained wafer characterization as a function of temperature is also presented in the context of relevant constitutive equations.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael L. R. Fripp and Nesbitt W. Hagood "Comparsion of electrostrictive and piezoceramic actuation for vibration suppression", Proc. SPIE 2443, Smart Structures and Materials 1995: Smart Structures and Integrated Systems, (8 May 1995); https://doi.org/10.1117/12.208272
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
Semiconducting wafers

Temperature metrology

Actuators

Vibration control

Polarization

Control systems

Amplifiers

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