Scattering effects in x-ray imaging systems

James E. Harvey

doi:10.1117/12.212595

20 June 1995 Scattering effects in x-ray imaging systems

James E. Harvey

Proceedings Volume 2515, X-Ray and Extreme Ultraviolet Optics; (1995) https://doi.org/10.1117/12.212595
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The optical performance achieved in many x-ray imaging applications is severely degraded by surface scattering effects. Residual surface roughness over a broad range of spatial frequencies must be specified and controlled for many applications of interest. Specifying the traditional surface `figure' and `finish' is inadequate for assuring the desired performance of high resolution imaging systems at these very short wavelengths. `Mid' spatial frequency surface errors that span the gap between the traditional `figure' and `finish' errors are often the dominant error source for both grazing incidence applications and those utilizing enhanced reflectance multilayers at normal incidence. Wide-angle scatter from surface microroughness severely reduces the reflectance of these multilayers whereas the small-angle scatter from the mid spatial frequency surface irregularities will degrade the resolution or image quality. A linear systems formulation of surface scattering theory results in a surface transfer function which characterizes the image degradation effects of residual surface irregularities over the entire range of relevant spatial frequencies. Image quality predictions obtained with this linear systems model agree favorably with experimental data for several different x-ray imaging systems. Parametric performance predictions can thus be used to determine realistic optical fabrication tolerances for x-ray astronomy, microscopy, and synchrotron source applications.

Citation Download Citation

James E. Harvey "Scattering effects in x-ray imaging systems", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); https://doi.org/10.1117/12.212595

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available