Real-time monitoring of diamond-like film growth by x-ray diffraction

Alexander M. Baranov; V. V. Sleptsov; Sergei A. Tereshin; Igor Fedorovich Mikhailov; V. I. Pinegin

doi:10.1117/12.211894

15 June 1995 Real-time monitoring of diamond-like film growth by x-ray diffraction

Alexander M. Baranov, V. V. Sleptsov, Sergei A. Tereshin, Igor Fedorovich Mikhailov, V. I. Pinegin

Proceedings Volume 2519, X-Ray and Ultraviolet Sensors and Applications; (1995) https://doi.org/10.1117/12.211894
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The first in-situ x-ray monitoring was applied for superthin (20-250 A) diamond-like carbon (DLC) films investigation. The film thickness, density, roughness, and growth rate were calculated from reflectivity measurements during deposition and etching processes. The objects of in-situ investigations were DLC films obtained by RF-method in C₆H₁₂+Ar and C₆H₁₂+N₂ mixtures on silicon substrates. The results of an investigation reveal that the roughness and the density of DLC films were varied at early stages. It was shown that obtained results can be explained by island mechanism of DLC films growth. It was shown that in-situ x-ray monitoring system permits us to examine the ultra thin layers and also to carry out the diagnostic of transient processes as the deposition conditions changes.

Citation Download Citation

Alexander M. Baranov, V. V. Sleptsov, Sergei A. Tereshin, Igor Fedorovich Mikhailov, and V. I. Pinegin "Real-time monitoring of diamond-like film growth by x-ray diffraction", Proc. SPIE 2519, X-Ray and Ultraviolet Sensors and Applications, (15 June 1995); https://doi.org/10.1117/12.211894

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