Evolution of the Si-SiO2 interface characteristics due to preoxidation texturing of silicon surface

Anatoliy P. Gorban; Pyotr I. Didenko; Vitaliy P. Kostylyov; Vladimir G. Litovchenko; Igor B. Nikolin; Galina Ph. Romanova; Alexandr A. Serba; Vladimir V. Chernenko

doi:10.1117/12.217347

23 August 1995 Evolution of the Si-SiO₂ interface characteristics due to preoxidation texturing of silicon surface

Anatoliy P. Gorban, Pyotr I. Didenko, Vitaliy P. Kostylyov, Vladimir G. Litovchenko, Igor B. Nikolin, Galina Ph. Romanova, Alexandr A. Serba, Vladimir V. Chernenko

Author Affiliations +

Proceedings Volume 2531, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XIV; (1995) https://doi.org/10.1117/12.217347
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Electrical, photoelectrical, and impurity-structural properties of the Si-SiO₂ structures formed under the same technological conditions at flat type (FS) and textured (TS) surface regions of silicon wafers were investigated. Enhanced in comparison with FS surface generation velocity, S_g, increased built-in oxide charge density, N_sO, and comparatively high differential concentration of interface states, N_ss, were obtained with TS. Typical for P_b-centers maximums in N_ss(E) spectra at energy position E equals E_c-0.25 eV were observed both for FS and TS samples indicating the participation of silicon atoms with dandling bonds in formation of the Si-SiO₂ interface states. Accordingly to SIMS data, the oxide layer at TS was highly contaminated by alkali metals (Na, K) the microstructure of the Si-SiO₂ interface being more disordered and 'friable' than in the FS case.

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Anatoliy P. Gorban, Pyotr I. Didenko, Vitaliy P. Kostylyov, Vladimir G. Litovchenko, Igor B. Nikolin, Galina Ph. Romanova, Alexandr A. Serba, and Vladimir V. Chernenko "Evolution of the Si-SiO₂ interface characteristics due to preoxidation texturing of silicon surface", Proc. SPIE 2531, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XIV, (23 August 1995); https://doi.org/10.1117/12.217347

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