Optical processing and recording by scanning near-field optic/atomic force microscope (SNOAM)

Kunio Nakajima; Yasuyuki Mitsuoka; Norio Chiba; Hiroshi Muramatsu; Tatsuaki Ataka; Masamichi Fujihira

doi:10.1117/12.218691

6 September 1995 Optical processing and recording by scanning near-field optic/atomic force microscope (SNOAM)

Kunio Nakajima, Yasuyuki Mitsuoka, Norio Chiba, Hiroshi Muramatsu, Tatsuaki Ataka, Masamichi Fujihira

Proceedings Volume 2535, Near-Field Optics; (1995) https://doi.org/10.1117/12.218691
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

This paper describes the design and applications to optical processing and recording of a Scanning Near-field Optic/Atomic-force Microscope (SNOAM). A sharpened and bent optical fiber was used as a near-field optical probe as well as an atomic force microscope probe in a vertical vibrating mode. SNOAM provides simultaneous topographical and optical images with high resolution beyond the diffraction limit. As an example of an application to optical processing, near-field exposures have been demonstrated by a SNOAM. We produced pit and line patterns exposed and developed in commercial photoresist film. In the processing mode, the pit and line patterns down to a width of 100 nm have been fabricated on a Si wafer through the Integrated Circuits process.

Citation Download Citation

Kunio Nakajima, Yasuyuki Mitsuoka, Norio Chiba, Hiroshi Muramatsu, Tatsuaki Ataka, and Masamichi Fujihira "Optical processing and recording by scanning near-field optic/atomic force microscope (SNOAM)", Proc. SPIE 2535, Near-Field Optics, (6 September 1995); https://doi.org/10.1117/12.218691

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