Edge control in computer-controlled optical polishing

Xuejun Zhang; Jingchi Yu; Xiafei Sun; Zhongyu Zhang

doi:10.1117/12.218435

8 September 1995 Edge control in computer-controlled optical polishing

Xuejun Zhang, Jingchi Yu, Xiafei Sun, Zhongyu Zhang

Proceedings Volume 2536, Optical Manufacturing and Testing; (1995) https://doi.org/10.1117/12.218435
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

In this paper, edge control algorithm is studied based on a modified removal function, a computer simulation program is written to provide information on edge figuring process. The reliability of the algorithm is confirmed by CCP polishing experiment. The experimental results appear to have good agreement with theoretical analysis, spherical surface with edge errors of 2.56(lambda) P-V ((lambda) equals 6328 angstrom) is polished for 1.5h, and the errors reduce to 0.89(lambda) P-V.

Citation Download Citation

Xuejun Zhang, Jingchi Yu, Xiafei Sun, and Zhongyu Zhang "Edge control in computer-controlled optical polishing", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); https://doi.org/10.1117/12.218435

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available