New interferometric method for thin-film metrology

Ludmila A. Gerasimova; Alexander O. Fedorov

doi:10.1117/12.212653

23 June 1995 New interferometric method for thin-film metrology

Ludmila A. Gerasimova, Alexander O. Fedorov

Proceedings Volume 2545, Interferometry VII: Applications; (1995) https://doi.org/10.1117/12.212653
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

A new interferometric method for measuring thickness and refractive index of thin films on substrates without a priori information about these two parameters is presented. For measurements, the substrate is produced in the form of a wedge, with the investigated film only on a part of it. Two complex patterns of interference equal-thickness fringes are observed, produced by interference in a two-beam interferometer with the sample, and by interference of two beams reflected by the sample surfaces, each for two different wavelengths. The values of the thin film thickness and refractive index are calculated from the values of relative shifts of interference fringes between two parts of each interference pattern. The thickness of a thin film is measured with accuracy of 5 nm.

Citation Download Citation

Ludmila A. Gerasimova and Alexander O. Fedorov "New interferometric method for thin-film metrology", Proc. SPIE 2545, Interferometry VII: Applications, (23 June 1995); https://doi.org/10.1117/12.212653

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available