Molecular beam study of N2 scattering from Si(100)

Jennifer L. W. Siders; Greg O. Sitz

doi:10.1117/12.221476

25 September 1995 Molecular beam study of N₂ scattering from Si(100)

Jennifer L. W. Siders, Greg O. Sitz

Proceedings Volume 2547, Laser Techniques for Surface Science II; (1995) https://doi.org/10.1117/12.221476
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The scattering of N₂ from Si(100) was studied using state-selective detection and molecular beam techniques. Both trapping-desorption and direct inelastic scattering channels were observed. For an incident N₂ energy of 0.08 eV, the trapping-desorption probability was found to be essentially unity for surface temperatures between 93 K and 573 K. The velocity and rotational state distributions of the desorbing molecules show that the nitrogen is fully accommodate with the surface. For an incident energy of 0.29 eV, a direct inelastic channel as well as the trapping-desorption channel was present. The rotational state distributions of both channels were studied as a function of surface temperature and incident energy.

Citation Download Citation

Jennifer L. W. Siders and Greg O. Sitz "Molecular beam study of N₂ scattering from Si(100)", Proc. SPIE 2547, Laser Techniques for Surface Science II, (25 September 1995); https://doi.org/10.1117/12.221476

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available