PtSi Schottky-barrier infrared focal plane array for ASTER/SWIR

Masashi Ueno; Tadashi Shiraishi; Makoto Kawai; Yoshikazu Yoneda; Masafumi Kimata; Masahiro Nunoshita

doi:10.1117/12.221395

29 September 1995 PtSi Schottky-barrier infrared focal plane array for ASTER/SWIR

Masashi Ueno, Tadashi Shiraishi, Makoto Kawai, Yoshikazu Yoneda, Masafumi Kimata, Masahiro Nunoshita

Proceedings Volume 2553, Infrared Spaceborne Remote Sensing III; (1995) https://doi.org/10.1117/12.221395
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

A PtSi Schottky-barrier infrared focal plane array (FPA) has been developed for the short wavelength infrared radiometer (SWIR) of the advanced spaceborne thermal emission and reflection radiometer (ASTER). Six linear image sensors, which correspond to six observation bands, are integrated on the FPA to simplify the cooling system and the optics. Each linear sensor has a stagger layout of 2100 PtSi Schottky-barrier detectors and has an effective fill factor of 100%. The detector size is 20 micrometers by 17 micrometers with a cross-track pitch of 16.5 micrometers and a spacing between adjacent sensors of 1.33 mm. The charge transfer in each linear sensor is carried out by two 4-phase buried-channel CCD shift registers. The driving clock and structure of the CCD are optimized to achieve a large charge handling capacity and low transfer inefficiency. To assure a high reliability and a focal plane flatness, we have developed an original multilayer ceramic package with a filter holding structure. A focal plane flatness less than 14 micrometers and a heat shock endurance over 4000 cycles are achieved by using this packaging technology. The wavelength region between 1.5 micrometers and 2.5 micrometers is separated into six bands by optical band-pass filters attached to the package.

Citation Download Citation

Masashi Ueno, Tadashi Shiraishi, Makoto Kawai, Yoshikazu Yoneda, Masafumi Kimata, and Masahiro Nunoshita "PtSi Schottky-barrier infrared focal plane array for ASTER/SWIR", Proc. SPIE 2553, Infrared Spaceborne Remote Sensing III, (29 September 1995); https://doi.org/10.1117/12.221395

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