Paper
1 September 1995 Advances in infrared antimonide technology
William F. Micklethwaite
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Abstract
Recently, significant advances have been made in both the application and production of the narrow gap, antimonide compound semiconductors. Growth of InSb and GaSb at 3 and even 4 inch diameters has been achieved with good homogeneity and acceptable defect density. Advances are being made to achieve a wafer surface finish suitable for direct epitaxy. New binary applications for large-area focalplane detector arrays, high resistivity substrates and thermophotovoltaics, and for the ternary (Ga,In)Sb are discussed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William F. Micklethwaite "Advances in infrared antimonide technology", Proc. SPIE 2554, Growth and Characterization of Materials for Infrared Detectors II, (1 September 1995); https://doi.org/10.1117/12.218185
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Cited by 5 scholarly publications.
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KEYWORDS
Semiconducting wafers

Gallium antimonide

Crystals

Doping

Infrared radiation

Surface finishing

Tellurium

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