CoSi2/Si1-xGex interfaces for Schottky barrier infrared detectors with extended detection regime

Sabine Kolodinski; Ricardo A. Donaton; Elisenda Roca; Matty Caymax; Karen Maex

doi:10.1117/12.218186

1 September 1995 CoSi₂/Si_1-xGe_x interfaces for Schottky barrier infrared detectors with extended detection regime

Sabine Kolodinski, Ricardo A. Donaton, Elisenda Roca, Matty Caymax, Karen Maex

Proceedings Volume 2554, Growth and Characterization of Materials for Infrared Detectors II; (1995) https://doi.org/10.1117/12.218186
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

A CoSi₂/strained-Si_1-xGe_x-Schottky barrier detector is proposed for detection of infrared radiation in the 3 - 5 micrometers window. It could be a substitute for PtSi/Si-Schottky barrier detectors, which have already been integrated with readout electronics, but which imply the disadvantage of having the metal Pt in the line as a possible source of contamination. A silicidation study on strained Si_1-xGe_x-layers with sacrificial Si-layers on top has been carried out to realize CoSi₂/strained-Si_1-xGe_x-interfaces, which will form the heart of the detector. The possibilities to integrate this detector with readout electronics are critically reviewed. First CoSi₂/Si_1-xGe_x-detectors have been processed which yield barrier heights as low as 229 meV.

Citation Download Citation

Sabine Kolodinski, Ricardo A. Donaton, Elisenda Roca, Matty Caymax, and Karen Maex "CoSi₂/Si_1-xGe_x interfaces for Schottky barrier infrared detectors with extended detection regime", Proc. SPIE 2554, Growth and Characterization of Materials for Infrared Detectors II, (1 September 1995); https://doi.org/10.1117/12.218186

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