Characterization of electroformed nickel microstructures

Qian Shi; Shih-Chia Chang; Michael W. Putty; David B. Hicks

doi:10.1117/12.221293

19 September 1995 Characterization of electroformed nickel microstructures

Qian Shi, Shih-Chia Chang, Michael W. Putty, David B. Hicks

Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221293
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Electroformed nickel resonators were constructed and tested in the temperature range of - 40 to 110 degrees C. The temperature sensitivities of the resonant frequencies are - 150 ppm/degrees C, - 200 ppm/degrees C, and - 3000 ppm/degrees C for cantilever beams, ring structures, and clamped-clamped bridges, respectively. The built-in stress for the bridge was estimated to be approximately 2 X 10⁹ dyne/cm². No resonant frequency shift was detected after long-term (over 60 days), large amplitude vibration. This implies that the electroformed nickel is a viable material for the construction of resonant mechanical sensors.

Citation Download Citation

Qian Shi, Shih-Chia Chang, Michael W. Putty, and David B. Hicks "Characterization of electroformed nickel microstructures", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); https://doi.org/10.1117/12.221293

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