Durable optical coatings for energetic UV laser sources

Ronald L. J. Cowell

doi:10.1117/12.237715

8 April 1996 Durable optical coatings for energetic UV laser sources

Ronald L. J. Cowell

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237715
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

It is now possible to manufacture repeatable, high laser damage threshold coatings for use at 193 nm and 248 nm. A variety of fluoride based and oxide multilayer coatings are available on standard or custom substrates.

Citation Download Citation

Ronald L. J. Cowell "Durable optical coatings for energetic UV laser sources", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237715

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