Local laser-induced film transfer: theory and applications

Vadim P. Veiko; Elena A. Shakhno; B. M. Yurkevich; Vladimir A. Chujko; B. G. Podlaskin; N. A. Tokranova

doi:10.1117/12.237762

8 April 1996 Local laser-induced film transfer: theory and applications

Vadim P. Veiko, Elena A. Shakhno, B. M. Yurkevich, Vladimir A. Chujko, B. G. Podlaskin, N. A. Tokranova

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237762
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

The technique of the local laser-induced film transfer (LIFT) is considered. The peculiarities of the front LIFT and the back one are investigated. The main fields of the LIFT applications are considered. Some particulars of the front and back LIFT applications--laser trimming of the coordinate characteristic of the position sensitive photoreceiver and deposition of the quartz glass local cover on to the silicic substrate--are considered in detail.

Citation Download Citation

Vadim P. Veiko, Elena A. Shakhno, B. M. Yurkevich, Vladimir A. Chujko, B. G. Podlaskin, and N. A. Tokranova "Local laser-induced film transfer: theory and applications", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237762

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