Paper
1 March 1996 Chirped DFB gratings using bent waveguides to tailor specific laser properties
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Proceedings Volume 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95; (1996) https://doi.org/10.1117/12.234182
Event: Fifth International Conference on Industrial Laser and Laser Applications '95, 1995, Shatura, Moscow, Russian Federation
Abstract
Bent waveguides are superimposed on homogeneous distributed feedback (DFB) grating fields to generate chirped DFB gratings. This efficient and high-resolution method enables the fabrication of arbitrarily axially chirped DFB gratings by appropriately bent waveguides which reveal differences between neighboring effective DFB pitches in the sub-interatomic range. The bending functions are generated by high-resolution lithography on a set of masks which can be frequently reused for a low-cost production process. The design principles are described defining specific unit cells which are reproduced as often as necessary to obtain a full coverage of the wafer. The method is demonstrated for semiconductor lasers including DFB gratings.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hartmut Hillmer "Chirped DFB gratings using bent waveguides to tailor specific laser properties", Proc. SPIE 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95, (1 March 1996); https://doi.org/10.1117/12.234182
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KEYWORDS
Waveguides

Phase shifts

Photomasks

Lithography

Semiconducting wafers

Tunable lasers

Wavelength tuning

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