Thin-plates test with modified IT-200 Fizeau interferometer

Alexis V. Kudryashov; Vadim V. Samarkin; A. A. Lukashev; O. V. Yunyakov

doi:10.1117/12.234240

1 March 1996 Thin-plates test with modified IT-200 Fizeau interferometer

Alexis V. Kudryashov, Vadim V. Samarkin, A. A. Lukashev, O. V. Yunyakov

Proceedings Volume 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95; (1996) https://doi.org/10.1117/12.234240
Event: Fifth International Conference on Industrial Laser and Laser Applications '95, 1995, Shatura, Moscow, Russian Federation

Abstract

The results of the test of the flatness and wedge of thin quartz plates with the help of a modified interferometer Fizeau are presented. The suggested scheme of the interferometer allows us to get and process two interferograms without any adjustment of the tested element. The accuracy of the suggested methods is not less than lambda/10 (lambda equals 0.6 micron).

Citation Download Citation

Alexis V. Kudryashov, Vadim V. Samarkin, A. A. Lukashev, and O. V. Yunyakov "Thin-plates test with modified IT-200 Fizeau interferometer", Proc. SPIE 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95, (1 March 1996); https://doi.org/10.1117/12.234240

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