UV damage threshold of molecular-beam-deposited fluoride coatings

Sven Laux; Klaus R. Mann; Ute Kaiser; Bernd Granitza; Oliver Roth; Wolfgang Richter

doi:10.1117/12.240373

27 May 1996 UV damage threshold of molecular-beam-deposited fluoride coatings

Sven Laux, Klaus R. Mann, Ute Kaiser, Bernd Granitza, Oliver Roth, Wolfgang Richter

Proceedings Volume 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995; (1996) https://doi.org/10.1117/12.240373
Event: Laser-Induced Damage in Optical Materials: 1995, 1995, Boulder, CO, United States

Abstract

Optical coatings for the ultraviolet spectral region consisting of fluorides have been made by molecular beam deposition in ultrahigh vacuum. The laser induced damage threshold at (lambda) equals 248 nm of the NdF₃ single layers has been improved by means of reactive deposition. It was found that the threshold of fluoride antireflection coatings for 248 nm is significantly lower than that of single layers and does not show significant dependence on reactive gas conditions. A surface smoothing has been obtained due to an interrupted growth of very thin sublayers crystallizing in different crystal lattices. The damage threshold of interrupted grown antireflection coatings is somewhat higher than that of a conventional one.

Citation Download Citation

Sven Laux, Klaus R. Mann, Ute Kaiser, Bernd Granitza, Oliver Roth, and Wolfgang Richter "UV damage threshold of molecular-beam-deposited fluoride coatings", Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); https://doi.org/10.1117/12.240373

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