Method of shearing interferometry for characterizing non-Gaussian randomly rough surfaces

Ivan Ohlidal; Miloslav Ohlidal; Daniel Franta; A. Michalek

doi:10.1117/12.246771

19 August 1996 Method of shearing interferometry for characterizing non-Gaussian randomly rough surfaces

Ivan Ohlidal, Miloslav Ohlidal, Daniel Franta, A. Michalek

Author Affiliations +

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246771
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

In this paper a method of shearing interferometry enabling us to perform a characterization of the basic statistical properties of non-gaussian randomly rough surfaces of solids will be described. This method is based on a statistical analysis of the form of dark fringe centers taking place in interferograms obtained by using a suitable interference microscope. By means of the method the root-mean-square values of heights and slopes, the values of autocorrelation lengths, autocorrelation coefficients of the heights and autocorrelation coefficient of the slopes of surface irregularities of glass diffusers will be determined.

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Ivan Ohlidal, Miloslav Ohlidal, Daniel Franta, and A. Michalek "Method of shearing interferometry for characterizing non-Gaussian randomly rough surfaces", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246771

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