Laser deposition of thin buffer and YBCO thin films on Si and GaAs substrates

Rumen I. Tomov; Peter A. Atanasov; Valery S. Serbezov

doi:10.1117/12.232214

11 March 1996 Laser deposition of thin buffer and YBCO thin films on Si and GaAs substrates

Rumen I. Tomov, Peter A. Atanasov, Valery S. Serbezov

Proceedings Volume 2777, ALT'95 International Symposium on Advanced Materials for Optics and Optoelectronics; (1996) https://doi.org/10.1117/12.232214
Event: ALT '95 International Conference: Advanced Materials for Optics and Optoelectronics, 1995, Prague, Czech Republic

Abstract

The growth and characterization of YBaCuO thin films and related buffer layers (BaTiO₃, ZrO₂, BaTiO₃, LiNbO₃) grown by laser ablation on Si and GaAs substrates, are described. Both buffers and YBuCuO layers have been deposited using XeCl excimer laser (308 nm). The morphology and structure of the films have been determined using XRD and SEM analyses. A good quality textured YBaCuO film could be grown on single crystal as well as polycrystalline buffer layer deposited on Si and GaAs. The key to the successful film deposition is the low processing temperatures involved, which minimized the interface reactions as observed by EDAX spectroscopy, as well as direct cw carbon-dioxide laser irradiation of growing film.

Citation Download Citation

Rumen I. Tomov, Peter A. Atanasov, and Valery S. Serbezov "Laser deposition of thin buffer and YBCO thin films on Si and GaAs substrates", Proc. SPIE 2777, ALT'95 International Symposium on Advanced Materials for Optics and Optoelectronics, (11 March 1996); https://doi.org/10.1117/12.232214

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available