PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
A piezoelectric ZnO layer is used to set thin silicon membrane into vibrations. The possibility to apply this micromechanical structure as an ultrasonic transducer is studied. High vibration modes are characterized with a considerable ultrasonic radiation. The application of the structure for ultrasonic nebulization is discussed.
Roumiana Paneva
"Micromechanical ultrasonic transducer for liquid nebulization", Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); https://doi.org/10.1117/12.237026
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Roumiana Paneva, "Micromechanical ultrasonic transducer for liquid nebulization," Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); https://doi.org/10.1117/12.237026