Multiaperture overlap-scanning technique for moire metrology

Mingyi Chen; De-zhu Wu

doi:10.1117/12.245156

19 July 1996 Multiaperture overlap-scanning technique for moire metrology

Mingyi Chen, De-zhu Wu

Proceedings Volume 2861, Laser Interferometry VIII: Applications; (1996) https://doi.org/10.1117/12.245156
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

In moire technique there are some inherent drawbacks such as: inevitable shadow in illumination and readout, limited depth and size of measurement which obstruct its further application in topographic measurement of large object, especially with complicated shape. Our studies show that the multi-aperture overlap-scanning techniques can also be applied to moire method. Therefore, not only all these drawbacks can be removed, the problem sensitive to eccentric positioning of object and axis swing of the turntable in 360 degree(s) profilometry can also be overcome. In this paper the mathematical model for Moire pattern transformation and connection is described, and results of simulation tests are presented.

Citation Download Citation

Mingyi Chen and De-zhu Wu "Multiaperture overlap-scanning technique for moire metrology", Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); https://doi.org/10.1117/12.245156

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