Comparison of experimentally measured differential scattering cross sections of PSL spheres on flat surfaces and patterned surfaces

Greg W. Starr; E. Dan Hirleman

doi:10.1117/12.256197

4 November 1996 Comparison of experimentally measured differential scattering cross sections of PSL spheres on flat surfaces and patterned surfaces

Greg W. Starr, E. Dan Hirleman

Author Affiliations +

Proceedings Volume 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1996) https://doi.org/10.1117/12.256197
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

While angle-resolved scatter has been extensively investigated for particles on smooth and rough semiconductor surfaces by Bawolek and Warner, similar fundamental studies for particles on patterned surfaces are quite limited. In this paper we report results of research on the effects of adjacent surface features (simulating IC patterns) on scattering by particles. Experimental measurements of angle- resolved scattering signatures of individual submicron particles on a test wafer are presented. In particular, the effects of the relative position of the particle with respect to the pattern are shown. The results provide some fundamental insight into the potential particle sizing errors associated with particle detection on patterned surfaces.

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Greg W. Starr and E. Dan Hirleman "Comparison of experimentally measured differential scattering cross sections of PSL spheres on flat surfaces and patterned surfaces", Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); https://doi.org/10.1117/12.256197

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