Confocal microscope 3D visualizing method for fine surface characterization of microstructures

Yoshiharu Ichikawa; Jun-ichiro Toriwaki

doi:10.1117/12.256194

4 November 1996 Confocal microscope 3D visualizing method for fine surface characterization of microstructures

Yoshiharu Ichikawa, Jun-ichiro Toriwaki

Proceedings Volume 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1996) https://doi.org/10.1117/12.256194
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

We describe a computer aided surface classification method with the scanning confocal microscope for observing a high aspect ratio device with 3D structure. As such device, we make use of Digital Mirror Device (DMD). To eliminate the distortion in the display image with DMD, the micro-mirror of DMD should be processed so that they form an exactly flat plane, and the condition of mirrors should be monitored after manufacturing DMD. In monitoring with the conventional optical microscope, it is hard to observe the accurate 3D condition due to very limited depth of focus and poor resolution. SEM can not be used to confirm the high speed motion of micro-mirror by the external digital driving signal to generate the display image, because SEM needs the closed vacuums environment. Solving these issues, we have developed the 3D visualizing technology with the scanning confocal microscope. The scanning confocal microscope can achieve the resolution superior to the conventional optical microscope. Furthermore we can check the tilted micro-mirror of DMD in the atmosphere. Considering that a raw image of the scanning confocal microscope is of higher resolution, we treated a raw image as an optical tomographic image, and developed a 3D visualizing method by accumulating such thin optical tomographic images of the scanning confocal microscope.

Citation Download Citation

Yoshiharu Ichikawa and Jun-ichiro Toriwaki "Confocal microscope 3D visualizing method for fine surface characterization of microstructures", Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); https://doi.org/10.1117/12.256194

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