Instrument for measuring flatness by using laser and CCD

Qun Hao; Mang Cao; Dacheng Li

doi:10.1117/12.256203

4 November 1996 Instrument for measuring flatness by using laser and CCD

Qun Hao, Mang Cao, Dacheng Li

Proceedings Volume 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1996) https://doi.org/10.1117/12.256203
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

In this paper, an instrument for measuring flatness derivation by using an aligned laser beam and CCD detector is described. A stable aligned laser beam is used to form a datum plane in the instrument by rotating shaft and a pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result shows that the measurement accuracy ofthe instrument is 2.3x r6. Keyword: Flatness, Laser beam, CCD detector

Citation Download Citation

Qun Hao, Mang Cao, and Dacheng Li "Instrument for measuring flatness by using laser and CCD", Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); https://doi.org/10.1117/12.256203

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