Ellipsometric topometry for technical surfaces

Wolfgang Holzapfel; Ulrich Neuschaefer-Rube; Jochen Doberitzsch

doi:10.1117/12.246211

16 August 1996 Ellipsometric topometry for technical surfaces

Wolfgang Holzapfel, Ulrich Neuschaefer-Rube, Jochen Doberitzsch

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246211
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

In our contribution we describe a novel application of reflection ellipsometry to surface measurement. Not only the refractive index of the surface material but also the deterministic surface structure is concluded from the ellipsometric parameters (Delta) , (Psi) , and p. To achieve this, we here proposed two novel procedures: (1) the ellipsometric differential topometry and (2) the ellipsometric reference film method. The required measurement setup is described. To measure the ellipsometric parameters we developed a novel measurement procedure. Results of preliminary experiments are presented.

Citation Download Citation

Wolfgang Holzapfel, Ulrich Neuschaefer-Rube, and Jochen Doberitzsch "Ellipsometric topometry for technical surfaces", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246211

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available