Advanced software system for yield improvement on manufacturing fab

Miguel Recio; Almudena Fernandez; Victorino Martin Santamaria; Maria J. Peman; Gerardo Gonzalez; J. R. Hoyer; Steve Whitlock; David James; Mark Hausen

doi:10.1117/12.250830

12 September 1996 Advanced software system for yield improvement on manufacturing fab

Miguel Recio, Almudena Fernandez, Victorino Martin Santamaria, Maria J. Peman, Gerardo Gonzalez, J. R. Hoyer, Steve Whitlock, David James, Mark Hausen

Author Affiliations +

Proceedings Volume 2874, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II; (1996) https://doi.org/10.1117/12.250830
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

How can we optimize the data collection and data processing to provide us with the most significant information to drive the yield enhancement in a fast and efficient way? With the aim of facing this question this paper describes a software- system which is a part of the global yield enhancement strategy at our factory. The software developed correlates data gathered both in-line and at the end of the fabrication process. The description of the system is accompanied with descriptions of historical cases trying to show the capabilities of the type of correlation. The paper also discusses the natural expansion of the software-system to convert it into a more 'knowledge-based' tool.

Citation Download Citation

Miguel Recio, Almudena Fernandez, Victorino Martin Santamaria, Maria J. Peman, Gerardo Gonzalez, J. R. Hoyer, Steve Whitlock, David James, and Mark Hausen "Advanced software system for yield improvement on manufacturing fab", Proc. SPIE 2874, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II, (12 September 1996); https://doi.org/10.1117/12.250830

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