Fabrication of fused silica phase masks by reactive ion etching

Genxiang Chen; Shuisheng Jian; Ling Yang; Xun Li; Meiqiao Cheng; Yaqing Zhu; Li Li; Huang Ge; Wei Wang

doi:10.1117/12.251861

23 September 1996 Fabrication of fused silica phase masks by reactive ion etching

Genxiang Chen, Shuisheng Jian, Ling Yang, Xun Li, Meiqiao Cheng, Yaqing Zhu, Li Li, Huang Ge, Wei Wang

Proceedings Volume 2885, Holographic Optical Elements and Displays; (1996) https://doi.org/10.1117/12.251861
Event: Photonics China '96, 1996, Beijing, China

Abstract

A novel method for producing durable fused silica self- interference phase grating photomasks is described in this paper. The gratin pattern is formed into AZ-1350 photoresist by 325nm He-Cd laser optical holographic exposure and is transferred to a thin metal layer via focused ion beam lithography, then reactive ion etching in CHF₃/O₂ plasma is used to etch the fused silica substrate. Inspection performed by scanning electron microscopy shows that fabricated silica phase masks are perfect and no reactive deposition is formed int he grating grooves.

Citation Download Citation

Genxiang Chen, Shuisheng Jian, Ling Yang, Xun Li, Meiqiao Cheng, Yaqing Zhu, Li Li, Huang Ge, and Wei Wang "Fabrication of fused silica phase masks by reactive ion etching", Proc. SPIE 2885, Holographic Optical Elements and Displays, (23 September 1996); https://doi.org/10.1117/12.251861

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