Surface pretreatment of LPE HgCdTe epilayer for passivation technology of photodiode array

Yi Li; Song He

doi:10.1117/12.252122

25 September 1996 Surface pretreatment of LPE HgCdTe epilayer for passivation technology of photodiode array

Yi Li, Song He

Proceedings Volume 2894, Detectors, Focal Plane Arrays, and Applications; (1996) https://doi.org/10.1117/12.252122
Event: Photonics China '96, 1996, Beijing, China

Abstract

A new surface pretreating method of the LPE HgCdTe surface involves three steps. The state of the surface before and after the pre-treatment process has been investigated by Scanning Electron Microscopy and X-ray Photoelectron Spectroscopy. The treated surface following the processes is compared to the untreated surface. The results show the Electron Channel Pattern and morphology of the treated surface are better than that of the untreated surface. The optical and electrical parameters of before and after the treated epilayers have not changed. The oxides and contaminants have been reduced and eliminated. The photodiode arrays with good performance have been fabricated on the LPE HgCdTe which is treated as the described approach. The experimental results indicate that the appropriate surface pre-treatment is an important part of the photodiode array technology.

Citation Download Citation

Yi Li and Song He "Surface pretreatment of LPE HgCdTe epilayer for passivation technology of photodiode array", Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); https://doi.org/10.1117/12.252122

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available