Comparison of surface contour measurements based on speckle pattern sampling and coordinate measuring machines

Gregory R. Hallerman; Lyle G. Shirley

doi:10.1117/12.263314

20 January 1997 Comparison of surface contour measurements based on speckle pattern sampling and coordinate measuring machines

Gregory R. Hallerman, Lyle G. Shirley

Author Affiliations +

Proceedings Volume 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II; (1997) https://doi.org/10.1117/12.263314
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

A noncontact 3D imaging technique based on tunable lasers is investigated to assess its performance compared to commercially available methods. In this technique, an object is flood illuminated by an external cavity tunable diode laser. As the laser frequency is scanned, the time-varying speckle-intensity pattern provides information about the depth of the scattering object. The patterns are recorded with a CCD camera, and the object's height profile is then extracted from the 3D fast Fourier transform. This paper presents the first quantitative comparison of results using this technique with those from a well-known standard instrument--the coordinate measuring machine. The object used for the comparison is a pressed sheet-metal part with dimensions of approximately 1-- by 100 by 20 mm. We found the standard deviation (sigma) of the difference between the two profiles to be less than 0.2 (Delta) z, where (Delta) z is the raw range resolution of the speckle-pattern-sampling technique.

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Gregory R. Hallerman and Lyle G. Shirley "Comparison of surface contour measurements based on speckle pattern sampling and coordinate measuring machines", Proc. SPIE 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II, (20 January 1997); https://doi.org/10.1117/12.263314

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