Improved off-axis pulsed laser deposition method

Narumi Inoue; Tatsuya Ozaki; Toshiaki Monnaka; Shigeru Kashiwabara; Ryozo Fujimoto

doi:10.1117/12.270083

31 March 1997 Improved off-axis pulsed laser deposition method

Narumi Inoue, Tatsuya Ozaki, Toshiaki Monnaka, Shigeru Kashiwabara, Ryozo Fujimoto

Proceedings Volume 2992, Excimer Lasers, Optics, and Applications; (1997) https://doi.org/10.1117/12.270083
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

A reduction is achieved in the number of droplets and/or large particles scattered on the surface of grown film deposited by the pulsed laser deposition method. An aperture plate is placed in front of the ablation target in order to block the scattering of droplets toward the substrate. The angle dependence of the number of scattering droplets is investigated, and the optimum aperture size and substrate position are determined. Using an aperture with 5 mm- diameter hole and placing the substrate in an off-axis position result in a significant reduction of the number of droplets. The aperture is found to prevent the scattering of droplets without substantially diminishing the deposition rate of the film.

Citation Download Citation

Narumi Inoue, Tatsuya Ozaki, Toshiaki Monnaka, Shigeru Kashiwabara, and Ryozo Fujimoto "Improved off-axis pulsed laser deposition method", Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997); https://doi.org/10.1117/12.270083

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