Paper
4 April 1997 Cavity structures for low-loss oxide-confined VCSELs
Kent D. Choquette, H. Roger Hadley, Weng W. Chow, Hong Q. Hou, Kent M. Geib, B. Eugene Hammons, D. Mathes, Robert Hull
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Abstract
We examine the threshold characteristics of selectively oxidized VCSELs as a function of the number, thickness, and placement of the buried oxide apertures. The threshold current density for small area VCSELs is shown to increase with the number of oxide apertures in the cavity due to increased optical loss, while the threshold current density for broad area VCSELs decreases with increasing number of apertures due to more uniform current injection. Reductions of the threshold gain and optical loss are achieved for small area VCSELs using thin oxide apertures which are displaced longitudinally away from the optical cavity. We show that the optical loss can be sufficiency reduced to allow lasing in VCSELs with aperture area as small as 0.25 micrometer2.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kent D. Choquette, H. Roger Hadley, Weng W. Chow, Hong Q. Hou, Kent M. Geib, B. Eugene Hammons, D. Mathes, and Robert Hull "Cavity structures for low-loss oxide-confined VCSELs", Proc. SPIE 3003, Vertical-Cavity Surface-Emitting Lasers, (4 April 1997); https://doi.org/10.1117/12.271067
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KEYWORDS
Vertical cavity surface emitting lasers

Oxides

Optical resonators

Laser damage threshold

Laser scattering

Near field optics

Oxidation

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