Polarization interference metrology for statistical parameters of optical fields

Oleg V. Angelsky; Peter P. Maksimyak

doi:10.1117/12.271837

1 April 1997 Polarization interference metrology for statistical parameters of optical fields

Oleg V. Angelsky, Peter P. Maksimyak

Author Affiliations +

Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271837
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland

Abstract

Polarization interference metrology of the optical fields' transverse correlation function and its amplitude and phase statistical moments are discussed. Examples of application of such a metrology to the problem of surface roughness diagnostics are also presented.

Citation Download Citation

Oleg V. Angelsky and Peter P. Maksimyak "Polarization interference metrology for statistical parameters of optical fields", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); https://doi.org/10.1117/12.271837

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