Laser beam removal of microstructures with Nd:YAG lasers

Dirk Hellrung; Arnold Gillner; Reinhart Poprawe

doi:10.1117/12.281085

18 August 1997 Laser beam removal of microstructures with Nd:YAG lasers

Dirk Hellrung, Arnold Gillner, Reinhart Poprawe

Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.281085
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Laser beam removal with Nd:YAG-lasers is a manufacturing method to produce micro-structures with the precision of a few micrometers. Because many materials can be structured with laser radiation, especially hard metals and ceramics, it is a very flexible technology for the production of tools for micro-embossing and micro-stamping. The combination of the laser and stamping technology offers the possibility to produce high quantities of micro-parts at moderate costs. A system for laser beam removal, existing of a handling with a CAD/CAM coupling and a diode pumped solid state laser was developed and in several investigations the quality of these micro-tools was tested.

Citation Download Citation

Dirk Hellrung, Arnold Gillner, and Reinhart Poprawe "Laser beam removal of microstructures with Nd:YAG lasers", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); https://doi.org/10.1117/12.281085

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