Comparison of the moire two-beam phase-stepping and Fourier transform method techniques in Fizeau interferometry

Benito Vasquez Dorrio; Jose Carlos Lopez Vazquez; Jose M. Alen; J. Bugarin; Antonio Fernandez; Angel F. Doval; Jesus Blanco-Garcia; Mariano Perez-Amor; J. L. Fernandez

doi:10.1117/12.281167

17 September 1997 Comparison of the moire two-beam phase-stepping and Fourier transform method techniques in Fizeau interferometry

Benito Vasquez Dorrio, Jose Carlos Lopez Vazquez, Jose M. Alen, J. Bugarin, Antonio Fernandez, Angel F. Doval, Jesus Blanco-Garcia, Mariano Perez-Amor, J. L. Fernandez

Author Affiliations +

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281167
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

We have previously proposed a phase evaluation method of multiple-beam Fizeau patterns that combines the two-beam phase-stepping algorithms with the more effect. This method is based on a multiplicative moire image formation process obtained y the direct superposition of high-frequency multiple-beam Fizeau carrier fringes on a transmission grating. In this paper the contrast between this Moire two- beam phase-stepping technique and the direct evaluation of the high-frequency multiple-beam Fizeau carrier fringes by means of the Fourier Transform Method is presented.

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Benito Vasquez Dorrio, Jose Carlos Lopez Vazquez, Jose M. Alen, J. Bugarin, Antonio Fernandez, Angel F. Doval, Jesus Blanco-Garcia, Mariano Perez-Amor, and J. L. Fernandez "Comparison of the moire two-beam phase-stepping and Fourier transform method techniques in Fizeau interferometry", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281167

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