Hybrid coupling of laser light sources to silicon (oxy) nitride-based waveguides

A. J. T. de Krijger; Herman H. P. Th. Bekman

doi:10.1117/12.281219

24 September 1997 Hybrid coupling of laser light sources to silicon (oxy) nitride-based waveguides

A. J. T. de Krijger, Herman H. P. Th. Bekman

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281219
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

An efficient method was developed to couple a diode laser to a high contrast waveguides. The laserdiodes were mounted with sub-micron precision using a thermocompression mounting technique. An AlGaAs ((lambda) equals 850 nm) laserdiode was coupled to a SiON based slab waveguide (efficiency (eta) EQ 25 - 30%) and to a Si₂N₄ based ridge waveguide (efficiency (eta) equals 20%) on silicon. A start has been made with the determination of the lifetime of thermocompression mounted laserdiodes. AlGaAs ((lambda) equals 850 nm) lasers as well as AlGaInP ((lambda) equals 675 nm) lasers were tested. The first results indicate that lifetimes in the range 10 - 30 years are possible for CW operation at 30 degree(s)C. The laser- waveguide coupling technique is demonstrated in a sensor platform.

Citation Download Citation

A. J. T. de Krijger and Herman H. P. Th. Bekman "Hybrid coupling of laser light sources to silicon (oxy) nitride-based waveguides", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281219

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available